%AZhou, Haocheng%ASheplak, Mark%Anull Ed.%BJournal Name: Journal of Microelectromechanical Systems; Journal Volume: 29; Journal Issue: 5 %D2020%I %JJournal Name: Journal of Microelectromechanical Systems; Journal Volume: 29; Journal Issue: 5 %K %MOSTI ID: 10222129 %PMedium: X %TA MEMS-Based Fast-Response Miniature Five-Hole Probe With Optical Pressure Transducers %X %0Journal Article