%ANejadriahi, Hani%APappert, Steve%AFainman, Yeshaiahu%AYu, Paul%BJournal Name: Optics Letters; Journal Volume: 46; Journal Issue: 18; Related Information: CHORUS Timestamp: 2022-08-09 15:14:51 %D2021%IOptical Society of America %JJournal Name: Optics Letters; Journal Volume: 46; Journal Issue: 18; Related Information: CHORUS Timestamp: 2022-08-09 15:14:51 %K %MOSTI ID: 10304727 %PMedium: X %TEfficient and compact thermo-optic phase shifter in silicon-rich silicon nitride %X

The design, fabrication, and characterization of low-loss ultra-compact bends in high-index (n=3.1atλ<#comment/>=1550nm) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of65×<#comment/>65µ<#comment/>m2, having a total active waveguide length of 1.2 mm. The device featured a phase-shifting efficiency of8mW/π<#comment/>and a 3 dB switching bandwidth of 15 KHz. We propose SRN as a promising thermo-optic platform that combines the properties of silicon and stoichiometric silicon nitride.

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