%AJi, Q.%AJi, Q. [Acceleration Technology and Applied Physics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA]%AAfridi, K.%AAfridi, K. [Cornell University, Ithaca, New York 14850, USA]%ABauer, T.%ABauer, T. [Acceleration Technology and Applied Physics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA]%AGiesbrecht, G.%AGiesbrecht, G. [Acceleration Technology and Applied Physics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA]%AHou, Y. [Cornell University, Ithaca, New York 14850, USA]%AHou, Y.%ALal, A.%ALal, A. [Cornell University, Ithaca, New York 14850, USA]%ANi, D. [Cornell University, Ithaca, New York 14850, USA]%ANi, D.%APersaud, A.%APersaud, A. [Acceleration Technology and Applied Physics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA]%AQin, Z.%AQin, Z. [Acceleration Technology and Applied Physics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA]%ASeidl, P.%ASeidl, P. [Acceleration Technology and Applied Physics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA]%ASinha, S. [Cornell University, Ithaca, New York 14850, USA]%ASinha, S.%ASchenkel, T. [Acceleration Technology and Applied Physics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA]%ASchenkel, T.%BJournal Name: Review of Scientific Instruments; Journal Volume: 92; Journal Issue: 10; Related Information: CHORUS Timestamp: 2023-08-02 22:17:46 %D2021%IAmerican Institute of Physics %JJournal Name: Review of Scientific Instruments; Journal Volume: 92; Journal Issue: 10; Related Information: CHORUS Timestamp: 2023-08-02 22:17:46 %K %MOSTI ID: 10306932 %PMedium: X %TBeam power scale-up in micro-electromechanical systems based multi-beam ion accelerators %X

We report on the development of multi-beam radio frequency (RF) linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 112 beams. The total argon ion current extracted from the 112-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path toward using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in material processing.

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