%AZhang, Yanqi%AGuzman, Felipe%BJournal Name: Optics Letters; Journal Volume: 47; Journal Issue: 19; Related Information: CHORUS Timestamp: 2022-09-27 11:15:28 %D2022%IOptical Society of America; None %JJournal Name: Optics Letters; Journal Volume: 47; Journal Issue: 19; Related Information: CHORUS Timestamp: 2022-09-27 11:15:28 %K %MOSTI ID: 10372748 %PMedium: X %TQuasi-monolithic heterodyne laser interferometer for inertial sensing %X

We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of11pm/Hzat100mHzand as low as0.6pm/Hzabove1pm. The prototype unit is20mm×<#comment/>20mm×<#comment/>10mmin size and weighs4.5g, allowing subsequent integration in compact systems.

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