%ALi, Yunze%AZhang, Dongzhe%AWang, Hui%AYe, Gaihua%AHe, Rui%ACong, Weilong%BJournal Name: Ultrasonics Sonochemistry; Journal Volume: 89; Journal Issue: C %D2022%I %JJournal Name: Ultrasonics Sonochemistry; Journal Volume: 89; Journal Issue: C %K %MOSTI ID: 10374053 %PMedium: X %TTheoretical and experimental investigations on rotary ultrasonic surface micro-machining of brittle materials %X %0Journal Article