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Preserving a contamination-free metal–semiconductor interface in β-Ga2O3 is critical to achieve consistently low resistance (< 1 Ω-mm) ohmic contacts. Here, we report a scanning transmission electron microscopy study on the variation in Ti/Au ohmic contact quality to (010) β-Ga2O3 in a conventional lift-off vs a metal-first process. We observe a thin ∼1 nm carbon barrier between the Ti and Ga2O3 in a non-conductive contact fabricated by a conventional lift-off process, which we attribute to photoresist residue, not previously detected by x-ray photoelectron spectroscopy due to the thinness and patchy coverage of the carbon layer, as well as roughness of the Ga2O3 surface. This thin carbon barrier is confirmed by electron energy loss spectroscopy and atomic force microscopy-infrared spectroscopy. We believe that the presence of the thin and patchy carbon layer leads to the highly inconsistent contact behavior in previous reports on non-alloyed contacts. Adventitious carbon is also observed in a conductive ohmic contact metal-first processing on an as-grown sample. We find that a five minute active oxygen descum is sufficient to remove this carbon on as-grown samples, further improving the ohmic behavior and reducing the contact resistance Rc to 0.06 Ω-mm. We also show that an hour long UV-ozone treatment of the Ga2O3 surface can eliminate carbon residue from the lift-off processing, resulting in a low Rc of 0.05 Ω-mm. 

Operando synchrotron X-ray diffraction (XRD) studies have not previously been used to directly characterize Li metal in standard batteries due to the extremely weak scattering from Li atoms. In this work, it is demonstrated the stripping and plating of Li metal can be effectively quantified during battery cycling in appropriately designed synchrotron XRD experiments that utilize an anode-free battery configuration in which a Li-containing cathode material of LiNi 0.6 Mn 0.2 Co 0.2 O 2 (NMC622) is paired with a bare anode current collector consisting of either Cu metal (Cu/NMC) or Mo metal (Mo/NMC). In this configuration, it is possible to probe local variations in the deposition and stripping of Li metal with sufficient spatial sensitivity to map the inhomogeneity in pouch cells and to follow these processes with sufficient time resolution to track state-of-charge-dependent variations in the rate of Li usage at a single point. For the Cu/NMC and Mo/NMC batteries, it was observed that the initial plating of Li occurred in a very homogeneous manner but that severe macroscopic inhomogeneity arose on a mm-scale during the subsequent stripping of Li, contrasting with the conventional wisdom that the greatest challenges in Li metal batteries are associated with Li deposition.