skip to main content
US FlagAn official website of the United States government
dot gov icon
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
https lock icon
Secure .gov websites use HTTPS
A lock ( lock ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.


Search for: All records

Creators/Authors contains: "Einck, Vincent_J"

Note: When clicking on a Digital Object Identifier (DOI) number, you will be taken to an external site maintained by the publisher. Some full text articles may not yet be available without a charge during the embargo (administrative interval).
What is a DOI Number?

Some links on this page may take you to non-federal websites. Their policies may differ from this site.

  1. Abstract Highly efficient metalens arrays designed for 550 nm are directly printed using UV‐assisted nanoimprint lithography (UV‐NIL) and a TiO2nanoparticle (NP)‐based ink on 8″ optical wafers with imprint times less than 5 min. Approximately one‐thousand 4‐mm metalenses are fabricated per wafer with uniform optical performance using a reusable PDMS‐based elastomeric stamp. The absolute and relative focusing efficiencies are as high as 81.2% and 90.4%, respectively, matching closely with the simulated maximum efficiencies of 83% and 91% achievable with the given master design, indicating that future improvements are possible, and efficiencies are not limited by materials or process. The imprinted metalenses are free from organics due to a post‐imprint calcination step and exhibit outstanding dimensional and optical stabilities. The highest efficiencies are attained using imprint formulations comprised of mixtures of 10 and 20 nm TiO2NPs, whose denser packing not only increases the refractive index (RI) of the calcined lenses up to 2.0 but also reduces the feature shrinkage relative to the master. 25 cycles of atomic layer deposition of TiO2following imprinting increase the RI up to 2.3 without changing dimensions by uniform gap filling between NPs. This work opens a path for true, full‐scale additive manufacturing of metaoptics. 
    more » « less