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Free, publicly-accessible full text available September 1, 2022
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Abstract We explore the prospects and benefits of combining the techniques of cavity optomechanics with efforts to image spins using magnetic resonance force microscopy (MRFM). In particular, we focus on a common mechanical resonator used in cavity optomechanics—high-stress stoichiometric silicon nitride (Si3N4) membranes. We present experimental work with a ‘trampoline’ membrane resonator that has a quality factor above 106and an order of magnitude lower mass than a comparable standard membrane resonators. Such high-stress resonators are on a trajectory to reach 0.1
force sensitivities at MHz frequencies by using techniques such as soft clamping and phononic-crystal control ofmore »