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Abstract The impact of alkali‐rich and alkali‐depleted surface terminations on dielectric nonlinearity and ferroelectric properties was investigated in sputtered K0.5Na0.5NbO3(KNN) films. For the alkali depleted surface termination, a ∼3 nm thick amorphous interfacial layer was found near the top electrode. The presence of a non‐ferroelectric interfacial layer reduces both the net remanent (Pr) and maximum polarization (Pmax) while increasing the coercive field (Ec) in the KNN films.Pmaxdecreased from 31.5 to 30.3 µC/cm2, likely due to the reduced electric field in the bulk of the film. The influence of the interfacial layer on dielectric properties was evaluated using a capacitor in series model. After removing the effects of the interfacial layer, the Rayleigh coefficientsεinitand α increased by 11 and 47%, respectively. The interfacial layer has more impact on irreversible domain wall motion than on reversible contributions to the relative permittivity. It is believed that this occurs because a higher concentration of defects, such as or , associated with the alkali‐depleted interfacial layer generates internal fields that pin domain walls. Alkali depleted surface terminations also produce a higher pseudo‐activation energy for polarization reversal compared to films with alkali rich terminations, with deeper potential wells in the material's energy landscape.more » « less
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