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Atomic defects underpin the properties of van der Waals materials, and their understanding is essential for advancing quantum and energy technologies. Scanning transmission electron microscopy is a powerful tool for defect identification in atomically thin materials, and extending it to multilayer and beam-sensitive materials would accelerate their exploration. Here, we establish a comprehensive defect library in a bilayer of the magnetic quasi-1D semiconductor CrSBr by combining atomic-resolution imaging, deep learning, and calculations. We apply a custom-developed machine learning work flow to detect, classify, and average point vacancy defects. This classification enables us to uncover several distinct Cr interstitial defect complexes, combined Cr and Br vacancy defect complexes, and lines of vacancy defects that extend over many unit cells. We show that their occurrence is in agreement with our computed structures and binding energy densities, reflecting the intriguing layer interlocked crystal structure of CrSBr. Our calculations show that the interstitial defect complexes give rise to highly localized electronic states. These states are of particular interest due to the reduced electronic dimensionality and magnetic properties of CrSBr and are, furthermore, predicted to be optically active. Our results broaden the scope of defect studies in challenging materials and reveal new defect types in bilayer CrSBr that can be extrapolated to the bulk and to over 20 materials belonging to the same FeOCl structural family. 

Abstract Based on historical developments and the current state of the art in gas-phase transmission electron microscopy (GP-TEM), we provide a perspective covering exciting new technologies and methodologies of relevance for chemical and surface sciences. Considering thermal and photochemical reaction environments, we emphasize the benefit of implementing gas cells, quantitative TEM approaches using sensitive detection for structured electron illumination (in space and time) and data denoising, optical excitation, and data mining using autonomous machine learning techniques. These emerging advances open new ways to accelerate discoveries in chemical and surface sciences. Graphical abstract