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Superlattices composed of either monoclinic μ-Fe2O3 or β-(AlxGa1−x)2O3 with β-Ga2O3 spacers are grown on (010) β-Ga2O3 substrates using plasma-assisted molecular beam epitaxy. High-resolution x-ray diffraction data are quantitatively fit using commercial dynamical x-ray diffraction software (LEPTOS) to obtain layer thicknesses, strain, and compositions. The strain state of β-(AlxGa1−x)2O3 and μ-Fe2O3 superlattices as characterized using reciprocal space maps in the symmetric (020) and asymmetric (420) diffraction conditions indicates coherent growths that are strained to the (010) β-Ga2O3 lattice. β-(AlxGa1−x)2O3 and μ-Fe2O3 superlattices grown at hotter substrate temperatures result in crystal structures with better coherency and reduced defects compared to colder growths. The growth rate of μ-Fe2O3 is ∼2.6 nm/min at Tsub = 700 °C and drops to ∼1.6 nm/min at Tsub = 800 °C due to increased Fe interdiffusion at hotter substrate temperatures. Scanning transmission electron microscopy data of a μ-Fe2O3 superlattice grown at Tsub = 700 °C confirm that there is significant diffusion of Fe atoms into β-Ga2O3 layers.

Nanowire AlGaN III‐nitride LEDs are claimed as potential high‐efficiency solid‐state photon sources spanning to the short‐wavelength deep ultraviolet (UV). Nanowire LEDs (NWLEDs) emitting in the UV are compared with a transparent n‐AlGaN top electrode formed by coalescing the top region of nanowire–ensemble LEDs with commonly employed opaque conformal metallic electrodes used for nanowire‐based devices. The use of a transparent contact results in an increase in the wall plug efficiency of >25×, exceeding the expected increase due to enhanced photon‐extraction efficiency. Increased nanowire connectivity reduces the short‐circuit pathways, enabling higher device yields of relatively large‐area (>1 mm²) UV nanowire–ensemble LEDs. Despite these large relative improvements, the absolute output efficiency remains miniscule (<1 m%). Electroluminescence microscopy demonstrates that <0.1% of nanowires within the ensemble contribute to emission. The single‐nanowire efficiency is estimated and points toward improvement of the homogeneity of the injection current as a crucial step for realizing commercially viable UV NWLEDs.