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Electronic devicesforrecording neuralactivityinthe nervoussyste m needto bescalableacrosslargespatialandte mporalscales whilealso providing millisecondandsingle-cellspatiote mporalresolution. H o w e v e r, e xi s ti n g hi g h- r e s ol u ti o n n e u r al r e c o r di n g d e vi c e s c a n n o t achievesi multaneousscalability on bothspatialandte mporallevels due toatrade-offbetweensensordensityand mechanicalflexibility. Here weintroduceathree-di mensional(3D)stackingi mplantableelectronic platfor m,basedonperfluorinateddielectricelasto mersandtissue-levelsoft multilayerelectrodes,thatenablesspatiote mporallyscalablesingle-cell neuralelectrophysiologyinthenervoussyste m. Ourelasto mersexhibit stable dielectric perfor mancefor overayearin physiologicalsolutions andare10,000ti messofterthanconventional plastic dielectrics. By leveragingthese uniquecharacteristics we developthe packaging of lithographednano metre-thickelectrodearraysina3Dconfiguration with across-sectionaldensityof7.6electrodesper100μ m2.Theresulting3D integrated multilayersoftelectrodearrayretainstissue-levelflexibility, reducingchronici m muneresponsesin mouse neuraltissues,and de monstratestheabilitytoreliablytrackelectricalactivityinthe mouse brain orspinalcord over months without disruptingani mal behaviour.