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Abstract BackgroundThermomechanical testing of nanomaterials is essential to assess their performance in applications where thermal and mechanical loads occur simultaneously. However, developing a multi-physics testing platform for nanomaterials that integrates temperature control, displacement control, and force sensing remains challenging due to the interference between heating and mechanical testing components. ObjectiveThis work aims to develop a novel microelectromechanical system-based platform for in situ thermomechanical testing of nanomaterials with displacement control and precise temperature regulation. MethodsThe platform integrates a high-stiffness thermal actuator, Joule heating elements, and a capacitive displacement sensor, along with sample stage heaters featuring thermal insulation and thermal expansion compensation structures. Finite element analysis was used to optimize the design and minimize thermomechanical interference. Heating performance was characterized using Raman spectroscopy and resistance measurements. ResultsDisplacement control and precise localized temperature control are achieved, overcoming limitations of transient heat transfer and thermal drift observed in previous systems. Its performance is demonstrated through in situ thermomechanical tensile testing of silver nanowires, showcasing its capability for nanoscale material characterization. ConclusionsThe developed microelectromechanical system platform enables thermomechanical investigation of size-dependent phenomena in nanomaterials, such as phase transitions and temperature-dependent fracture. Its displacement control and localized temperature regulation, combined with in-situ observation, provide a powerful tool for understanding nanoscale deformation and fracture mechanisms.