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A dust particle immersed in a glow-discharge plasma has long been known to have a charge that isnegative, while the plasma is powered. However, in the afterglow, following the stopping of the plasma power, a largepositivecharge can collect on the particle, as was shown recently for particles in a cathodic sheath. While that outcome of positive charging in the afterglow may be common, an experimental discovery reported here reveals that the opposite outcome is also possible: a particle can develop anegativecharge in the afterglow, if the plasma had previously been operated with a modulated power. Before stopping the plasma power off altogether, in a run with power modulated at a low duty cycle of 4.5$\mathrm{\%}$, the particle’s residual charge was negative, but it was positive in a control run without modulation. This result points to a way of controlling the charge of dust particles in a decaying plasma, which can be useful for mitigating defects in semiconductor manufacturing.

 

Particle contamination due to plasma processing motivates the design of a method of electrically lifting particles in a time interval after a plasma’s power is turned off. Small solid dust particles have electric charges that are not frozen until a late stage of the plasma afterglow. Beyond that time, before they fall to a surface below and cause defects, particles can be lifted in a controlled manner by applying an appropriate direct-current (DC) electric field, as we demonstrate experimentally. A few milliseconds after an argon plasma’s capacitively coupled radio-frequency power is switched off, a vertical DC electric field is applied. Thereafter, video imaging shows that the falling of the particles is slowed or stopped altogether, depending on the magnitude of the upward electric force.

 

A method is demonstrated for controlling the charge of a dust particle in a plasma afterglow, allowing a wider range of outcomes than an earlier method. As in the earlier method, the dust particles are located near an electrode that has a DC voltage during the afterglow. Here, that DC voltage is switched to a positive value at a specified delay time, instead of maintaining a constant negative voltage as in the earlier method. Adjusting the timing of this switching allows one to control the residual charge gradually over a wide range that includes both negative and positive values of charge. For comparison, only positive residual charges were attained in the earlier method. We were able to adjust the residual charge from about −2000 eto +10 000 e, for our experimental parameters (8.35 µm particles, 8 mTorr argon pressure, and a DC voltage that was switched from −150 V to +125 V within the first two milliseconds of the afterglow). The plasma conditions near the dust particles changed from ion-rich to electron-rich, when the electrode was switched from cathodic to anodic. Making this change at a specified time, as the electrons and ions decay in the afterglow, provides this control capability. These results also give insight into the time development of a dust particle’s charge in the afterglow, on a sub-millisecond time scale.

 

The Coulomb expansion of a thin cloud of charged dust particles was observed experimentally, in a plasma afterglow. This expansion occurs due to mutual repulsion among positively charged dust particles, after electrons and ions have escaped the chamber volume. In the experiment, a two-dimensional cloud of dust particles was initially levitated in a glow-discharge plasma. The power was then switched off to produce afterglow conditions. The subsequent fall of the dust cloud was slowed by reversing the electric force, to an upward direction, allowing an extended observation. At early time, measurements of the Coulomb expansion in the horizontal direction are found to be accurately modeled by the equation of state for a uniformly charged thin disk. Finally, bouncing from the lower electrode was found to be avoided by lowering the impact velocity <100 mm/s. 

In an experiment, the power that sustains a plasma was extinguished, so that microspheres, which had been levitated, fell downward toward a lower electrode. At the beginning of their fall, the microspheres were self-organized with a crystalline structure. This structure was found to be preserved as the microspheres accelerated all the way to the lower electrode. Although microspheres had, in this afterglow plasma, large positive charges of 12,500  e , their interparticle repulsion was unable to significantly alter the crystalline arrangement of the microspheres, as they fell. After their impact on the lower electrode, the microspheres bounced upward, and only then was the crystalline structure lost. 

Complex plasma is a state of soft matter where micrometer-sized particles are immersed in a weakly ionized gas. The particles acquire negative charges of the order of several thousand elementary charges in the plasma, and they can form gaseous, liquid and crystalline states. Direct optical observation of individual particles allows to study their dynamics on the kinetic level even in large many-particle systems. Gravity is the dominant force in ground-based experiments, restricting the research to vertically compressed, inhomogeneous clouds, or two-dimensional systems, and masking dynamical processes mediated by weaker forces. An environment with reduced gravity, such as provided on the International Space Station (ISS), is therefore essential to overcome this limitations. We will present the research goals for the next generation complex plasma facility COMPACT to be operated onboard the ISS. COMPACT is envisaged as an international multi-purpose and multi-user facility that gives access to the full three-dimensional kinetic properties of the particles.