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This paper investigates the use of power semiconductor devices in a nine - level cascaded H-bridge (CHB) multilevel inverter topology with an integrated battery energy storage system (BESS) for a 13.8kV medium voltage distribution system. In this topology, the bulky conventional step-up 60 Hz transformer is not used. The purpose of this study is to analyze the use of SiC MOSFET and Si IGBT devices in the inverter system to evaluate their respective performances. SiC MOSFET and Si IGBT switching devices are modeled and characterized using Saber® modeling software. The switching losses, thermal performance, and efficiency of the inverter system are investigated, and measurements are obtained from the simulation. Saber® provides a good capability for characterizing semiconductor models in the real world, with great features of computation. A three-phase SiC power MOSFET-based multilevel CHB inverter prototype is presented for experimental verification. In the investigation, better performances of SiC MOSFET devices are recorded. SiC devices demonstrate promising performance at different switching frequency and temperature ranges.