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Abstract As a promising alternative to the mainstream CoFeB/MgO system with interfacial perpendicular magnetic anisotropy (PMA),
L 10‐FePd and its synthetic antiferromagnet (SAF) structure with large crystalline PMA can support spintronic devices with sufficient thermal stability at sub‐5 nm sizes. However, the compatibility requirement of preparingL 10‐FePd thin films on Si/SiO2wafers is still unmet. In this paper, high‐qualityL 10‐FePd and its SAF on Si/SiO2wafers are prepared by coating the amorphous SiO2surface with an MgO(001) seed layer. The preparedL 10‐FePd single layer and SAF stack are highly (001)‐textured, showing strong PMA, low damping, and sizeable interlayer exchange coupling, respectively. Systematic characterizations, including advanced X‐ray diffraction measurement and atomic resolution‐scanning transmission electron microscopy, are conducted to explain the outstanding performance ofL 10‐FePd layers. A fully‐epitaxial growth that starts from MgO seed layer, induces the (001) texture ofL 10‐FePd, and extends through the SAF spacer is observed. This study makes the vision of scalable spintronics more practical.