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Since the new millennium coherent extreme ultra-violet and soft x-ray radiation has revolutionized the understanding of dynamical physical, chemical and biological systems at the electron’s natural timescale. Unfortunately, coherent laser-based upconversion of infrared photons to vacuum-ultraviolet and soft x-ray high-order harmonics in gaseous, liquid and solid targets is notoriously inefficient. In dense nonlinear media, the limiting factor is strong re-absorption of the generated high-energy photons. Here we overcome this limitation by generating high-order harmonics from a periodic array of thin one-dimensional crystalline silicon ridge waveguides. Adding vacuum gaps between the ridges avoids the high absorption loss of the bulk and results in a ~ 100-fold increase of the extraction depth. As the grating period is varied, each high harmonic shows a different and marked modulation, indicating their waveguiding in the vacuum slots with reduced absorption. Looking ahead, our results enable bright on-chip coherent short-wavelength sources and may extend the usable spectral range of traditional nonlinear crystals to their absorption windows. Potential applications include on-chip chemically-sensitive spectro-nanoscopy.

The progress in integration of nanodiamond with photonic devices is analyzed in the light of quantum optical applications. Nanodiamonds host a variety of optically active defects, called color centers, which provide rich ground for photonic engineering. Theoretical introduction describing light and matter interaction between optical modes and a quantum emitter is presented, including the role of the Debye–Waller factor typical of color center emission. The synthesis of diamond nanoparticles is discussed in an overview of methods leading to experimentally realized hybrid platforms of nanodiamond with gallium phosphide, silicon dioxide, and silicon carbide. The trade‐offs in the substrate index of refraction values are reviewed in the context of the achieved strength of light and matter interaction. Thereby, the recent results on the growth of color center‐rich nanodiamond on prefabricated silicon carbide microdisk resonators are presented. These hybrid devices achieve up to fivefold enhancement of the diamond color‐center light emission and can be employed in integrated quantum photonics.