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Abstract Resonant sensors based on micro- and nano-electro mechanical systems (M/NEMS) are ubiquitous in many sensing applications due to their outstanding performance capabilities, which are directly proportional to the quality factor (Q) of the devices. We address here a recurrent question in the field: do dynamical techniques that modify the effectiveQ(namely parametric pumping and direct drive velocity feedback) affect the performance of said sensors? We develop analytical models of both cases, while remaining in the linear regime, and introduce noise in the system from two separate sources: thermomechanical and amplifier (read-out) noise. We observe that parametric pumping enhances the quality factor in the amplitude response, but worsens it in the phase response on the resonator. In the case of feedback, we find thatQis enhanced in both cases. Then, we establish a solution for the noisy problem with direct drive and parametric pumping simultaneously. We also find that, in the case when thermomechanical noise dominates, no benefit can be obtained from either artificialQ-enhancement technique. However, in the case when amplifier noise dominates, we surprisingly observe that a significant advantage can only be achieved using parametric pumping in the squeezing region. 

We derive the displacement noise spectrum of a parametrically pumped resonator below the onset for self-excited oscillations. We extend the fluctuation-dissipation response of a thermomechanical-noise-driven resonator to the case of degenerate parametric pumping as a function of pump magnitude and frequency while properly accounting for the quadrature-dependence of the parametric thermal noise squeezing. We use measurements with a microelectromechanical cantilever to corroborate our model. 

Sensitive capacitive transduction of micromechanical resonators can contribute significant electrical dissipation, which degrades the quality factor of the eigenmodes. We theoretically and experimentally demonstrate a scheme for isolating the electrical damping of a mechanical resonator due to Ohmic dissipation in the readout amplifier. The quality factor suppression arising from the amplifier is strongly dependent on the amplifier feedback resistance and parasitic capacitance. By studying the thermomechanical displacement noise spectrum of a doubly clamped micromechanical beam, we confirm that electrical dissipation tunes the actual, not effective, quality factor. Electrical dissipation is an important consideration in the design of sensitive capacitive displacement transducers, which are a key component in resonant sensors and oscillators.