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Abstract Tuning and reconfiguring of nanophotonic components are needed to realize systems incorporating many components. The electrostatic force can deform a structure and tune its optical response. Despite the success of electrostatic actuators, they suffer from trade-offs between tuning voltage, tuning range, and on-chip area. Piezoelectric actuation could resolve these challenges, but only pm-per-volt scale wavelength tunability has been achieved. Here we propose and demonstrate compact piezoelectric actuators, called nanobenders, that transduce tens of nanometers per volt. By leveraging the non-uniform electric field from submicron electrodes, we generate bending of a piezoelectric nanobeam. Combined with a sliced photonic crystal cavity to sense displacement, we show tuning of an optical resonance by ~ 5 nm V−1 (0.6 THz V−1) and between 1520 ~ 1560 nm (~ 400 linewidths) within 4 V. Finally, we consider tunable nanophotonic components enabled by the nanobenders.more » « less
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Since the advent of the laser, acousto-optic modulators have been an important tool for controlling light. Recent advances in on-chip lithium niobate waveguide technology present new opportunities for these devices. We demonstrate a collinear acousto-optic modulator in a suspended film of lithium niobate employing a high-confinement, wavelength-scale waveguide. By strongly confining the optical and mechanical waves, this modulator improves a figure-of-merit that accounts for both acousto-optic and electro-mechanical efficiency by orders of magnitude. Our device demonstration marks a significant technological advance in acousto-optics that promises a novel class of compact and low-power frequency shifters, tunable filters, non-magnetic isolators, and beam deflectors.more » « less
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We demonstrate the first acousto-optic modulators in lithium niobate films on sapphire, detailing the dependence of the piezoelectric and optomechanical coupling coefficients on the crystal orientation. This platform supports highly confined, strongly piezoelectric mechanical waves without suspensions, making it a promising candidate for broadband and efficient integrated acousto-optic devices, circuits, and systems.more » « less
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