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Electron probe microanalysis is a nondestructive technique widely used to determine the elemental composition of bulk samples. This was extended to layered specimens, with the development of appropriate software. The traditional quantification method requires the use of matrix correction procedures based upon models of the ionization depth distribution, the so-called ϕ ( ρz ) distribution. Most of these models have led to commercial quantification programs but only few of them allow the quantification of layered specimens. Therefore, we developed BadgerFilm, a free open-source thin film program available to the general public. This program implements a documented ϕ ( ρz ) model as well as algorithms to calculate fluorescence in bulk and thin film samples. Part 1 of the present work aims at describing the operation of the implemented ϕ ( ρz ) distribution model and validating its implementation against experimental measurements and Monte Carlo simulations on bulk samples. The program has the ability to predict absolute X-ray intensities that can be directly compared to Monte Carlo simulations. We demonstrate that the implemented model works very well for bulk materials. And as will be shown in Part 2, BadgerFilm predictions for thin film specimens are also shown to be in good agreements with experimental and Monte Carlo results. 

Since the 1960s, thicknesses and compositions of thin-film specimens have been determined by using the nondestructive technique of electron probe microanalysis. This approach, refined in the 1990s, is based upon models of the ionization depth distribution, the so-called ϕ ( ρz ) distribution, and is capable of analyzing layered specimens. Most of these quantification models have led to commercial programs. However, these programs may have possible limitations: some may not be directly compatible with modern computers, they often are “black boxes” making it difficult to assess the reliability of the results, and they are sometimes expensive enough to restrain many labs from purchasing them. We present a user-friendly, free, open-source program, BadgerFilm, implementing a documented ϕ ( ρz ) model and algorithms allowing the quantification of stratified samples. The program has the ability to calculate absolute X-ray intensities that can be directly compared with Monte Carlo simulations. We give a detailed explanation for the operation of the employed ϕ ( ρz ) model in thin films. A wide range of detailed Monte Carlo simulations and experimental data have been used to evaluate and validate the accuracy of the implemented algorithms. BadgerFilm demonstrated excellent quantification results for the films and in many cases for the substrates. 

Abstract The relatively recent entry of field emission electron microprobes into the field of microanalysis provides another tool for the study of small features of interest (e.g., mineral and melt inclusions, ex-solution lamellae, grain boundary phases, high-pressure experimental charges). However, the critical limitation for accurate quantitative analysis of these submicrometer- to micrometer-sized features is the relationship between electron beam potential and electron scattering within the sample. To achieve submicrometer analytical volumes from which X-rays are generated, the beam accelerating voltage must be reduced from 15–20 to ≤10 kV (often 5 to 7 kV) to reduce the electron interaction volume from ~3 to ~0.5 μm in common geological materials. At these low voltages, critical Kα X-ray lines of transition elements such as Fe are no longer generated, so L X-ray lines must be used. However, applying the necessary matrix corrections to these L lines is complicated by bonding and chemical peak shifts for soft X-ray transitions such as those producing the FeLα X-ray line. It is therefore extremely challenging to produce accurate values for Fe concentration with this approach. Two solutions have been suggested, both with limitations. We introduce here a new, simple, and accurate solution to this problem, using the common mineral olivine as an example. We also introduce, for the first time, olivine results from a new analytical device, the Extended Range Soft X-ray Emission Spectrometer. 

Abstract The recent availability of Schottky-type field emission electron microprobes provides incentive to consider analyzing micrometer-sized features. Yet, to quantify sub-micrometer-sized features, the electron interaction volume must be reduced by decreasing accelerating voltage. However, the K lines of the transition elements (e.g., Fe) then cannot be excited, and the L lines must be used. The Fe L α 1,2 line is the most intense of the L series but bonding effects change its atomic parameters because it involves a valence band electron transition. For successful traditional electron probe microanalysis, the mass absorption coefficient (MAC) must be accurately known, but the MAC of Fe L α 1,2 radiation by Fe atoms varies from one Fe-compound to another and is not well known. We show that the conventional method of measuring the MAC by an electron probe cannot be used in close proximity to absorption edges, making its accurate determination impossible. Fortunately, we demonstrate, using a set of Fe–silicide compounds, that it is possible to derive an accurate calibration curve, for a given accelerating voltage and takeoff angle, which can be used to quantify Fe in Fe–silicide compounds. The calibration curve can be applied to any spectrometer without calibration and gives accurate quantification results.