In this work, a new theoretical model for contact resonance atomic force microscopy, which incorporates the elastic dynamics of a long sensing tip is presented. The model is based on the Euler–Bernoulli beam theory and includes coupling effects from the two-beam structure, also known as an ‘L-shaped’ beam in the literature. Here, high-accuracy prediction of the sample stiffness, using several vibration modes with a relative error smaller than 10% for practical working ranges, is demonstrated. A discussion on the model’s capability to predict the dynamic phenomena of eigenmode veering and crossing, as the force applied to the sample increases, is presented. The L-shaped beam model presented here is also applicable for structural applications such as: micro-electro-mechanical systems, energy harvesting, and unmanned aerial vehicle landing gear.
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Abstract -
Zimron-Politi, Nadav ; Tung, Ryan C ( , Nanotechnology)Abstract In this work, we present an experimental validation of a new contact resonance atomic force microscopy model developed for sensors with long, massive tips. A derivation of a new technique and graphical method for the identification of the unknown system parameters is presented. The technique and contact resonance model are experimentally validated. The agreement between our contact resonance experimental measurements and values obtained from nanoindentation show a minimal error of 1.4%–4.5% and demonstrate the validity of the new contact resonance model and system parameter identification technique.more » « less