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            Tan, Jun Ying; Kim, Albert; Kim, Jungkwun JK (, 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers))Hollow microneedles are extremely attractive to drug delivery domains with high demands from clinics and industry. However, its complicated fabrication processes have impeded its wide adoption. This paper presents a simple one-step fabrication method for hollow microneedles based on diffraction UV lithography and solid-liquid light propagation. The fabrication process utilizes bottom-up exposure of a liquid photosensitive resin through photomask patterns comprising a plurality of apertures. Hollow microneedles with various heights were fabricated in a range of 400 µm to 600 µm from a few minutes of UV exposure. The fabricated hollow microneedles were characterized with force-displacement tests showing a good tip strength of 0.35 N per single unit. A hollow fluidic test on a pig cadaver skin showed great potential for drug delivery. Also, batch fabrication with multiple height microneedles on a single substrate has demonstrated compatibility with the manufacturing process.more » « less
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            Tan, Jun Ying; Kim, Albert; Kim, Jungkwun ‘JK’ (, Applied Physics Letters)
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