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Micromirror based optical phased array for wide-angle beamsteering
Optical phased array (OPA) is a key enabling element for solid state LIDAR (light detection and ranging). In this paper, we demonstrate a novel MEMS micromirror array OPA. Vertical combdrive actuators are integrated underneath the mirrors to achieve a small pitch (2.4μm) and a large field of view (22° at 905nm wavelength and 40° at 1550nm). The OPA has 2μs response time, and 10V actuation voltage.
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- Award ID(s):
- 1640329
- PAR ID:
- 10026179
- Date Published:
- Journal Name:
- Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1109/MEMSYS.2017.7863553
