Dry Etching with Nanoparticles: Formation of High Aspect-Ratio Pores and Channels Using Magnetic Gold Nanoclusters
- Award ID(s):
- 1636101
- PAR ID:
- 10047427
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Materials
- Volume:
- 30
- Issue:
- 3
- ISSN:
- 0935-9648
- Page Range / eLocation ID:
- 1703091
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
More Like this
No document suggestions found
An official website of the United States government
