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Title: Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WN x C y Thin Films: Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WN x C y Thin Films
Award ID(s):
1828064
PAR ID:
10049543
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  
Publisher / Repository:
Wiley Blackwell (John Wiley & Sons)
Date Published:
Journal Name:
European Journal of Inorganic Chemistry
Volume:
2018
Issue:
1
ISSN:
1434-1948
Page Range / eLocation ID:
46 to 53
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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