Nepal, Neeraj, Anderson, Virginia R., Johnson, Scooter D., Downey, Brian P., Meyer, David J., DeMasi, Alexander, Robinson, Zachary R., Ludwig, Karl F., and Eddy, Jr., Charles R. Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35.3 Web. doi:10.1116/1.4978026.

Nepal, Neeraj, Anderson, Virginia R., Johnson, Scooter D., Downey, Brian P., Meyer, David J., DeMasi, Alexander, Robinson, Zachary R., Ludwig, Karl F., & Eddy, Jr., Charles R. Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 35 (3). https://doi.org/10.1116/1.4978026

Nepal, Neeraj, Anderson, Virginia R., Johnson, Scooter D., Downey, Brian P., Meyer, David J., DeMasi, Alexander, Robinson, Zachary R., Ludwig, Karl F., and Eddy, Jr., Charles R. "Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35 (3). United States: American Vacuum Society. https://doi.org/10.1116/1.4978026. https://par.nsf.gov/biblio/10052302.

@article{osti_10052302,
place = {United States}, title = {Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods}, url = {https://par.nsf.gov/biblio/10052302}, DOI = {10.1116/1.4978026}, abstractNote = {Not Available}, journal = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, volume = {35}, number = {3}, publisher = {American Vacuum Society}, author = {Nepal, Neeraj and Anderson, Virginia R. and Johnson, Scooter D. and Downey, Brian P. and Meyer, David J. and DeMasi, Alexander and Robinson, Zachary R. and Ludwig, Karl F. and Eddy, Jr., Charles R.}, }