Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase
- NSF-PAR ID:
- 10052920
- Publisher / Repository:
- American Institute of Physics
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 111
- Issue:
- 20
- ISSN:
- 0003-6951
- Page Range / eLocation ID:
- 201601
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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