- NSF-PAR ID:
- 10052932
- Publisher / Repository:
- American Vacuum Society
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- Volume:
- 34
- Issue:
- 4
- ISSN:
- 2166-2746
- Page Range / eLocation ID:
- 041229
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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