Bismuth telluride-based thin films have been investigated as the active material in flexible and micro thermoelectric generators (TEGs) for near room-temperature energy harvesting applications. The latter is a class of compact printed circuit board compatible devices conceptualized for operation at low-temperature gradients to generate power for wireless sensor nodes (WSNs), the fundamental units of the Internet-of-Things (IoT). CMOS and MEMS compatible micro-TEGs require thin films that can be integrated into the fabrication flow without compromising their thermoelectric properties. We present results on the thermoelectric properties of (Bi,Sb)2(Se,Te)3 thin films deposited via thermal evaporation of ternary compound pellets on four-inch SiO2 substrates at room temperature. Thin-film compositions and post-deposition annealing parameters are optimized to achieve power factors of 2.75 mW m−1 K−2 and 0.59 mW m−1 K−2 for p-type and n-type thin films. The measurement setup is optimized to characterize the thin-film properties accurately. Thin-film adhesion is further tested and optimized on several substrates. Successful lift-off of p-type and n-type thin films is completed on the same wafer to create thermocouple patterns as per the target device design proving compatibility with the standard MEMS fabrication process.
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Kirigami enhances film adhesion
Structures of thin films bonded on substrates have been used in technologies as diverse as flexible electronics, soft robotics, bio-inspired adhesives, thermal-barrier coatings, medical bandages, wearable devices and living devices. The current paradigm for maintaining adhesion of films on substrates is to make the films thinner, and more compliant and adhesive, but these requirements can compromise the function or fabrication of film–substrate structures. For example, there are limits on how thin, compliant and adhesive epidermal electronic devices can be fabricated and still function reliably. Here we report a new paradigm that enhances adhesion of films on substrates via designing rational kirigami cuts in the films without changing the thickness, rigidity or adhesiveness of the films. We find that the effective enhancement of adhesion by kirigami is due to (i) the shear-lag effect of the film segments; (ii) partial debonding at the film segments’ edges; and (iii) compatibility of kirigami films with inhomogeneous deformation of substrates. While kirigami has been widely used to program thin sheets with desirable shapes and mechanical properties, fabricate electronics with enhanced stretchability and design the assembly of three-dimensional microstructures, this paper gives the first systematic study on kirigami enhancing film adhesion. We further demonstrate novel applications including a kirigami bandage, a kirigami heat pad and printed kirigami electronics.
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- Award ID(s):
- 1661627
- NSF-PAR ID:
- 10056890
- Date Published:
- Journal Name:
- Soft Matter
- Volume:
- 14
- Issue:
- 13
- ISSN:
- 1744-683X
- Page Range / eLocation ID:
- 2515 to 2525
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1039/c7sm02338c
