del Corro, Pablo G., Imboden, Matthias, Pérez, Diego J., Bishop, David J., and Pastoriza, Hernán. Single ended capacitive self-sensing system for comb drives driven XY nanopositioners. Retrieved from https://par.nsf.gov/biblio/10057752. Sensors and Actuators A: Physical 271.C Web. doi:10.1016/j.sna.2017.11.021.

del Corro, Pablo G., Imboden, Matthias, Pérez, Diego J., Bishop, David J., & Pastoriza, Hernán. Single ended capacitive self-sensing system for comb drives driven XY nanopositioners. Sensors and Actuators A: Physical, 271 (C). Retrieved from https://par.nsf.gov/biblio/10057752. https://doi.org/10.1016/j.sna.2017.11.021

del Corro, Pablo G., Imboden, Matthias, Pérez, Diego J., Bishop, David J., and Pastoriza, Hernán. "Single ended capacitive self-sensing system for comb drives driven XY nanopositioners". Sensors and Actuators A: Physical 271 (C). Country unknown/Code not available. https://doi.org/10.1016/j.sna.2017.11.021. https://par.nsf.gov/biblio/10057752.

@article{osti_10057752,
place = {Country unknown/Code not available}, title = {Single ended capacitive self-sensing system for comb drives driven XY nanopositioners}, url = {https://par.nsf.gov/biblio/10057752}, DOI = {10.1016/j.sna.2017.11.021}, abstractNote = {}, journal = {Sensors and Actuators A: Physical}, volume = {271}, number = {C}, author = {del Corro, Pablo G. and Imboden, Matthias and Pérez, Diego J. and Bishop, David J. and Pastoriza, Hernán}, }