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Title: Parametric resonance of a repulsive force MEMS electrostatic mirror
Award ID(s):
1608692
PAR ID:
10061883
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Sensors and Actuators A: Physical
Volume:
265
Issue:
C
ISSN:
0924-4247
Page Range / eLocation ID:
20 to 31
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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