Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings
- NSF-PAR ID:
- 10066432
- Author(s) / Creator(s):
- ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; more »
- Date Published:
- Journal Name:
- Classical and Quantum Gravity
- Volume:
- 35
- Issue:
- 7
- ISSN:
- 0264-9381
- Page Range / eLocation ID:
- 075001
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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