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Title: Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings
Award ID(s):
1708175 1707866 1707863
PAR ID:
10066432
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; more » ; ; ; ; ; ; ; ; « less
Date Published:
Journal Name:
Classical and Quantum Gravity
Volume:
35
Issue:
7
ISSN:
0264-9381
Page Range / eLocation ID:
075001
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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