Talukdar, Tushar K., Wang, Wenjiao B., Girolami, Gregory S., and Abelson, John R. Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes. Journal of Vacuum Science & Technology A 36.5 Web. doi:10.1116/1.5038100.

Talukdar, Tushar K., Wang, Wenjiao B., Girolami, Gregory S., & Abelson, John R. Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes. Journal of Vacuum Science & Technology A, 36 (5). https://doi.org/10.1116/1.5038100

Talukdar, Tushar K., Wang, Wenjiao B., Girolami, Gregory S., and Abelson, John R. "Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes". Journal of Vacuum Science & Technology A 36 (5). United States: American Vacuum Society. https://doi.org/10.1116/1.5038100. https://par.nsf.gov/biblio/10073314.

@article{osti_10073314,
place = {United States}, title = {Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes}, url = {https://par.nsf.gov/biblio/10073314}, DOI = {10.1116/1.5038100}, abstractNote = {Not Available}, journal = {Journal of Vacuum Science & Technology A}, volume = {36}, number = {5}, publisher = {American Vacuum Society}, author = {Talukdar, Tushar K. and Wang, Wenjiao B. and Girolami, Gregory S. and Abelson, John R.}, }