Combinatorial Nitrogen Gradients in Sputtered Thin Films
- Award ID(s):
- 1534503
- PAR ID:
- 10074516
- Date Published:
- Journal Name:
- ACS Combinatorial Science
- Volume:
- 20
- Issue:
- 7
- ISSN:
- 2156-8952
- Page Range / eLocation ID:
- 436 to 442
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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