Investigation of surface boundary conditions for continuum modeling of RF plasmas
- Award ID(s):
- 1414552
- NSF-PAR ID:
- 10075351
- Date Published:
- Journal Name:
- Physics of Plasmas
- Volume:
- 25
- Issue:
- 5
- ISSN:
- 1070-664X
- Page Range / eLocation ID:
- 053509
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
More Like this
No document suggestions found
- Free Publicly Accessible Full Text
-
Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1063/1.5020983
