Dynamic response of a tunable MEMS accelerometer based on repulsive force
- Award ID(s):
- 1608692
- PAR ID:
- 10092092
- Date Published:
- Journal Name:
- Sensors and Actuators A: Physical
- Volume:
- 289
- Issue:
- C
- ISSN:
- 0924-4247
- Page Range / eLocation ID:
- 34 to 43
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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