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Title: Low temperature surface preparation of GaN substrates for atomic layer epitaxial growth: Assessment of ex situ preparations
Award ID(s):
1709380
PAR ID:
10104604
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
37
Issue:
2
ISSN:
0734-2101
Page Range / eLocation ID:
020908
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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