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Title: Nitrogen Incorporation Induced Soft-to-Hard Transition Observed in the Mechanical Properties of Amorphous Niobium Oxide Films
Award ID(s):
1827745
NSF-PAR ID:
10106083
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
JOM
ISSN:
1047-4838
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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