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Title: Monolithic radio frequency SiN x self-rolled-up nanomembrane interdigital capacitor modeling and fabrication
Award ID(s):
1701047
PAR ID:
10109243
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
Nanotechnology
Volume:
30
Issue:
36
ISSN:
0957-4484
Page Range / eLocation ID:
364001
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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