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Title: Next-generation virtual metrology for semiconductor manufacturing: A feature-based framework
Award ID(s):
1805950
PAR ID:
10112038
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Computers & Chemical Engineering
Volume:
127
Issue:
C
ISSN:
0098-1354
Page Range / eLocation ID:
140 to 149
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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