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Title: A micromachined water-immersible scanning mirror using BoPET hinges
Award ID(s):
1748161
PAR ID:
10113473
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Sensors and Actuators A: Physical
Volume:
298
Issue:
C
ISSN:
0924-4247
Page Range / eLocation ID:
111564
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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