Engineered PWM Drives for Achieving Rapid Step and Settle Times for MEMS Actuation
- Award ID(s):
- 1647837
- PAR ID:
- 10125252
- Publisher / Repository:
- Institute of Electrical and Electronics Engineers
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 27
- Issue:
- 3
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- p. 513-520
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation