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Title: Nanoscale density variations in sputtered amorphous TaO x functional layers in resistive switching devices
Award ID(s):
1905648
NSF-PAR ID:
10133180
Author(s) / Creator(s):
 ;  ;  
Publisher / Repository:
American Institute of Physics
Date Published:
Journal Name:
Journal of Applied Physics
Volume:
127
Issue:
5
ISSN:
0021-8979
Page Range / eLocation ID:
Article No. 055107
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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