Nanoscale density variations in sputtered amorphous TaO x functional layers in resistive switching devices
- Award ID(s):
- 1905648
- Publication Date:
- NSF-PAR ID:
- 10133180
- Journal Name:
- Journal of Applied Physics
- Volume:
- 127
- Issue:
- 5
- Page Range or eLocation-ID:
- Article No. 055107
- ISSN:
- 0021-8979
- Publisher:
- American Institute of Physics
- Sponsoring Org:
- National Science Foundation