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Title: Nanoscale density variations in sputtered amorphous TaO x functional layers in resistive switching devices
Authors:
 ;  ;  
Award ID(s):
1905648
Publication Date:
NSF-PAR ID:
10133180
Journal Name:
Journal of Applied Physics
Volume:
127
Issue:
5
Page Range or eLocation-ID:
Article No. 055107
ISSN:
0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
National Science Foundation
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