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  • Solid-Phase Epitaxy of Perovskite High Dielectric PrAlO 3 Films Grown by Atomic Layer Deposition for Use in Two-Dimensional Electronics and Memory Devices
Title: Solid-Phase Epitaxy of Perovskite High Dielectric PrAlO 3 Films Grown by Atomic Layer Deposition for Use in Two-Dimensional Electronics and Memory Devices
Award ID(s):
1720415
PAR ID:
10136201
Author(s) / Creator(s):
; ; ; ; ; ; ;
Date Published:
Journal Name:
ACS Applied Nano Materials
Volume:
2
Issue:
11
ISSN:
2574-0970
Page Range / eLocation ID:
7449 to 7458
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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