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Title: Fast Trajectory Tracking of a Flexure-Based, Multiaxis Nanopositioner With 50-mm Travel
Award ID(s):
1728313
PAR ID:
10143123
Author(s) / Creator(s):
;
Date Published:
Journal Name:
IEEE/ASME Transactions on Mechatronics
Volume:
23
Issue:
6
ISSN:
1083-4435
Page Range / eLocation ID:
2805 to 2813
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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