Fast Trajectory Tracking of a Flexure-Based, Multiaxis Nanopositioner With 50-mm Travel
- Award ID(s):
- 1728313
- PAR ID:
- 10143123
- Date Published:
- Journal Name:
- IEEE/ASME Transactions on Mechatronics
- Volume:
- 23
- Issue:
- 6
- ISSN:
- 1083-4435
- Page Range / eLocation ID:
- 2805 to 2813
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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