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Title: Effect of sputter pressure on microstructure and properties of β-Ta thin films
Award ID(s):
1719875 1810138
NSF-PAR ID:
10147070
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Acta Materialia
Volume:
183
Issue:
C
ISSN:
1359-6454
Page Range / eLocation ID:
504 to 513
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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