Phase transformation in MOCVD growth of (Al x Ga 1−x ) 2 O 3 thin films
- Award ID(s):
- 1810041
- NSF-PAR ID:
- 10158555
- Date Published:
- Journal Name:
- APL Materials
- Volume:
- 8
- Issue:
- 3
- ISSN:
- 2166-532X
- Page Range / eLocation ID:
- 031104
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation