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Title: Phase transformation in MOCVD growth of (Al x Ga 1−x ) 2 O 3 thin films
Award ID(s):
1810041
PAR ID:
10158555
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
APL Materials
Volume:
8
Issue:
3
ISSN:
2166-532X
Page Range / eLocation ID:
031104
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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